This paper reviews the significant successes in MEMS products from a reliability
perspective. MEMS reliability is challenging and can be device and process dependent, but …

Microelectromechanical systems (MEMS) are a fast‐growing field in microelectronics. MEMS
are commonly used as actuators and sensors with a wide variety of applications in health …

The promise of MEMS for aerospace applications has been germinating for years, and
current advances bring the field to the very cusp of fruition. Reliability is chief among the …

Integrated circuit packaging and their testing is well advanced because of the maturity of the
IC industry, their wide applications, and availability of industrial infrastructure. This is not true …

Microelectromechanical systems (MEMS) devices are being manufactured in the hundreds
of millions and are widely deployed for pressure sensor, accelerometer, display, and printing …

This chapter discusses the differences between the heritage microcircuit packaging world
and the still evolving MEMS packaging arena. Materials used in the packaging of MEMs are …

Successful production of MEMS devices in a volume-manufacturing environment requires
high reliability, efficient process and product characterization, and cost-effective testing …

Micro-electro-mechanical sensor systems (MEMS Sensors) are being considered for a
variety of applications in space and launch operations. These applications include health …

An innovative plastic deformation method is proposed to tune metal-based MEMS devices
after fabrication. The plastic deformation is a well-known failure mechanism in MEMS …

This dissertation proposes a novel accumulative test method for MEMS-based, commercial
off-the-shelves inertial measure units (IMUs) from the automotive field. The need for …