The device physics of commercially dominant diffused‐junction silicon solar cells is well
understood, allowing sophisticated optimization of this class of devices. Recently, so‐called …

This paper reviews the state of the art knowledge related to critical failure mechanisms in
electrostatic micro-and nano-electromechanical systems (MEMS and NEMS) which are the …

Nanobubbles are believed to have surface charges at the gas–liquid interface. However, the
effect of various factors on the formation mechanism and stability of these charged species is …

Electret materials find use in various applications, such as microphones or filter media. In
recent years, electrets have been used also increasingly on the micrometer scale, for …

A study of field emission process in MEMS-based capacitor/switch-like geometries is
presented. High resolution current–voltage characteristics up to breakdown have been …

Shunt capacitive RF MEMS switches were developed on GaAs substrate, using a III–V
technology process that is fully compatible with standard MMIC fabrication. The switches …

In this work, for the first time different stiction mechanisms in electrostatic micro-
electromechanical systems (MEMS) switches were studied. In these devices stiction can be …

The movement or migration of charges in dielectric materials like silicon oxide, silicon nitride
and glass, is recognized as one of the most significant causes of drift instability of MEMS …

The present paper aims to provide a better insight to the electrical characteristics of silicon
nitride films that have been deposited with PECVD method under different conditions. The …

In this study, two different characterization techniques based on Kelvin probe force
microscopy (KPFM) have been used to investigate the dielectric and substrate charging in …