A review of roll-to-roll nanoimprint lithography

N Kooy, K Mohamed, LT Pin, OS Guan - Nanoscale research letters, 2014 - Springer
Since its introduction in 1995, nanoimprint lithography has been demonstrated in many
researches as a simple, low-cost, and high-throughput process for replicating micro-and …

Fabrication of transistors on flexible substrates: from mass‐printing to high‐resolution alternative lithography strategies

PF Moonen, I Yakimets, J Huskens - Advanced materials, 2012 - Wiley Online Library
In this report, the development of conventional, mass‐printing strategies into high‐
resolution, alternative patterning techniques is reviewed with the focus on large‐area …

[图书][B] Graphene: an introduction to the fundamentals and industrial applications

H Shinohara, A Tiwari - 2015 - books.google.com
Often described as a" miracle material", graphene's potential applications are extraordinary,
ranging from nanoscale'green'technologies, to sensors and future conductive coatings. This …

Multilength scale patterning of functional layers by roll-to-roll ultraviolet-light-assisted nanoimprint lithography

M Leitgeb, D Nees, S Ruttloff, U Palfinger, J Götz… - ACS …, 2016 - ACS Publications
Top-down fabrication of nanostructures with high throughput is still a challenge. We
demonstrate the fast (> 10 m/min) and continuous fabrication of multilength scale structures …

Recent developments and design challenges in continuous roller micro-and nanoimprinting

JJ Dumond, H Yee Low - Journal of Vacuum Science & Technology B, 2012 - pubs.aip.org
As an emerging technology for the manufacture of micro-and nano-scale patterns,
continuous imprinting; otherwise known as roll-to-roll or roller imprinting, is attracting interest …

Roll to roll nanoimprint lithography

LJ Guo, SH Ahn - US Patent 8,027,086, 2011 - Google Patents
Among the various emerging techniques for nanoscale pat terning, nanoimprint lithography
(NIL) is a desirable tech nology for high-resolution nanolithography. Unlike tradi tional …

Large-area, continuous roll-to-roll nanoimprinting with PFPE composite molds

J John, YY Tang, JP Rothstein, JJ Watkins… - …, 2013 - iopscience.iop.org
Successful implementation of a high-speed roll-to-roll nanoimprinting technique for
continuous manufacturing of electronic devices has been hindered due to lack of simple …

[图书][B] Nanoimprint lithography

H Lan, Y Ding - 2010 - books.google.com
The Nanoimprint lithography (NIL) is a novel method of fabricating micro/nanometer scale
patterns with low cost, high throughput and high resolution (Chou et al., 1996). Unlike …

Importance of molds for nanoimprint lithography: Hard, soft, and hybrid molds

B Kwon, JH Kim - Journal of Nanoscience, 2016 - Wiley Online Library
Nanoimprint lithography has attracted considerable attention in academic and industrial
fields as one of the most prominent lithographic techniques for the fabrication of the …

Current innovations in roller embossing—A comprehensive review

SS Deshmukh, A Goswami - Microsystem Technologies, 2022 - Springer
Hot embossing (HE) is a micro-manufacturing technique used to develop micro and nano-
scaled patterns over a polymer workpiece. The traditional-HE process is only partially …