Mapping and imaging of thin films on large surfaces
Thin films covering large surfaces are used in a very wide range of applications from
displays through corrosion resistance, decoration, water proofing, smart windows, adhesion …
displays through corrosion resistance, decoration, water proofing, smart windows, adhesion …
A Self‐Assembly Method for Tunable and Scalable Nano‐Stamps: A Versatile Approach for Imprinting Nanostructures
In nanoimprint lithography (NIL), the imprinting stamp's fabrication is still a significant cost
factor among the consumables. Bottom‐up lithography approaches based on a phase …
factor among the consumables. Bottom‐up lithography approaches based on a phase …
A Spectroscopic Reflectance-Based Low-Cost Thickness Measurement System for Thin Films: Development and Testing
The requirement for alternatives in roll-to-roll (R2R) processing to expand thin film
inspection in wider substrates at lower costs and reduced dimensions, and the need to …
inspection in wider substrates at lower costs and reduced dimensions, and the need to …
Nanostructure Characterization and Film Thickness Measurements at the Fabrication Line
JSM Madsen, R Korhonen, P Peltonen… - 2022 IEEE 12th …, 2022 - ieeexplore.ieee.org
Roll-to-roll embossing is a fast and inexpensive method for producing nanotextured polymer
foils in high volumes. We present results from an optical scatterometric method for …
foils in high volumes. We present results from an optical scatterometric method for …
[PDF][PDF] Optical Scatterometry for Fast Evaluation of R2R Processed Structures
M Hadidi, M Tunesi, DA Lucca, M Stahr, PR Pagilla - nascent.utexas.edu
Optical Scatterometry measurements were performed on a mold and imprint produced by
roll-to-roll UV-assisted nanoimprinting lithography (R2R UV-NIL) in the visible spectral …
roll-to-roll UV-assisted nanoimprinting lithography (R2R UV-NIL) in the visible spectral …