Edge treatment for spurious mode suppression in thin-film lithium niobate resonators

A Aryal, S Tiwari, DW Branch, A Siddiqui, T Busani - Scientific Reports, 2024 - nature.com
Thin-film lithium niobate is an attractive material for RF acoustic devices because of its high
electromechanical coupling. However, due to the large coupling and the high anisotropy …

Etching of scandium-doped aluminum nitride using inductively coupled plasma dry etch and tetramethyl ammonium hydroxide

ASMZ Shifat, I Stricklin, RK Chityala, A Aryal, G Esteves… - MRS Advances, 2023 - Springer
Abstract Properties such as wide bandgap, higher electromechanical coupling, and low
dielectric permittivity have propelled Sc x Al1− x N as an advantageous material for …

Design and analysis of dual‐band plasmonic band pass filter using meandering step impedance resonator

RK Chityala, A Aryal, P Osman… - Microwave and …, 2024 - Wiley Online Library
In this article, we demonstrated the minimum significant dielectric thickness of silicon dioxide
(SiO2) below the diffraction limit for the confinement in the metal–insulator–metal (MIM) …