Y Xiao, L Yang, Y Jiang, S Liu, G Li,
J Ouyang… - …, 2024 - iopscience.iop.org
Abstract Lu doped Hf 0.5 Zr 0.5 O 2 (HZO) ferroelectric films were prepared on Pt/TiN/SiO
2/Si substrate by chemical solution deposition method, and an interfacial engineering …