A temperature-decoupled impedance-based mass sensing using CBAM-CNN and adaptive weighted average preprocessing with high accuracy
Microcantilevers are widely adopted in various fields for micro-mass sensing due to their
simple structure and high sensitivity. The conventional microcantilever-based measurement …
simple structure and high sensitivity. The conventional microcantilever-based measurement …
Performance enhancement of PEMC liquid level sensor subjected to environmental temperature variation
In this paper, the performance of a resonant Piezoelectric-excited Millimeter-sized Cantilever
(PEMC) used as liquid level sensor has been studied. The sensitivity of this sensor affected …
(PEMC) used as liquid level sensor has been studied. The sensitivity of this sensor affected …
Temperature compensation of MEMS based resonant sensor with uniform mass sensitivity
M Bayat, R Rajabi, H Joodaki - 2013 25th Chinese Control and …, 2013 - ieeexplore.ieee.org
High sensitive micro resonators are among the best way for measuring the mass of small
entities. The principal of these sensors is based on measuring the resonance frequency …
entities. The principal of these sensors is based on measuring the resonance frequency …