The accuracy of modern scientific research and technological advancement is highly reliant
on the ability to accurately measure weak signals. The lock-in amplifier (LIA) represents an …

In the present paper, a microbeam-based MEMS device is experimentally driven to
experience a subcombination internal resonance (IR) of the additive type, where the second …

In this paper, we developed a multi-physics model of an electrostatic MEMS resonator made
of an array of mechanically-coupled beams and investigate its potential use for mass …

In this study, we investigate the potential usage of electrostatic MEMS resonators for CO 2
sensing. The MEMS sensor consists of two cantilever microbeams supporting a microplate …

We report on the piezoresistive method for detecting stability loss events in
microelectromechanical sensors based on bifurcation. The method involves measuring the …

In this paper, we demonstrate the potential functionalization of inherent nonlinearities
associated with electrostatic MEMS resonators for low air pressure applications, with …

We report on a first implementation of a piezoresistive interrogation in a bifurcation-based
airflow velocity sensor. The affected by the flow snap-through transitions in a bistable double …

This paper introduces an experimental method to detect the motion of an electrostatic Micro-
Electro-Mechanical Systems (MEMS) resonator in aqueous media. The resonator comprises …

In this paper, we analyze the dynamic response of a MEMS device made of a microplate
supported by two microcantilever beams and electrically actuated via an underneath …