This paper reports an acceleration sensing method based on two weakly coupled
resonators (WCRs) using the phenomenon of mode localization. When acceleration acts on …

This paper reports a high-sensitivity resonant electrometer based on the mode localization
of two degree-of-freedom weakly coupled resonators (WCRs). When charges are applied to …

This paper, for the first time, reports a closedloop accelerometer based on three degree-of-
freedom weakly coupled resonator (WCR). Three resonators are weakly coupled by two …

This paper reports a closed-loop mode-localized accelerometer for the first time. The
accelerometer utilizes weakly coupled single-tine resonators as the sensing element to …

This paper proposes and verifies a structure for the isolation of packaging stress in silicon-
on-insulator-based microelectromechanical systems devices. The packaging-stress isolation …

This paper for the first time experimentally demonstrates the temperature drift suppression in
the linear measurement range of mode-localized resonant sensors. Based on a mode …

This paper describes a novel MEMS resonant accelerometer based on two weakly coupled
resonators (WCRs) using the phenomenon of mode localization. To the best of the authors' …

Influences of the feedthrough capacitance on weakly coupled micromechanical resonators
are theoretically analyzed and experimentally observed using current vector analysis and …

Abstract System development and characterization of a low noise low offset SOI MEMS–
CMOS PCB-integrated multi-chip±4g piezoresistive accelerometer sensor comprising a …

This paper describes the development and experimental evaluation of a
microelectromechanical system vibratory gyroscope using an optimized double closed-loop …