[HTML][HTML] A Novel Out-of-Control Action Plan (OCAP) for Optimizing Efficiency and Quality in the Wafer Probing Process for Semiconductor Manufacturing

W Yeo, YC Chang, LC Chen… - Sensors (Basel …, 2024 - pmc.ncbi.nlm.nih.gov
The out-of-control action plan (OCAP) is crucial in the wafer probing process of
semiconductor manufacturing as it systematically addresses and corrects deviations …

Experimental and theoretical investigation of needle contact behavior of wafer level probing

HY Chang, WF Pan, SM Lin - Precision engineering, 2011 - Elsevier
Wafer probing technique is important for testing integrated circuit devices. For the safety of
measured chips, the probe card must be examined to verify the performance before online …

Mechanical analysis of wafer testing with FEM simulations

AO Brezmes, C Breitkopf - Microelectronics Reliability, 2016 - Elsevier
In this work, finite element models are applied to analyze the influence of different
parameters on crack failure probability during wafer testing. Regarding simulations, there …

Investigation of contact behavior and design of vertical probe for wafer level probing

HY Chang, WF Pan, SM Lin - IEEE Transactions on …, 2012 - ieeexplore.ieee.org
It is necessary to analyze the mechanism of bump wafer probing, for bump height variation
and probe mark area significantly influence flip chip assembly reliability. This causes the …

Application of a genetic algorithm to the design optimization of a multilayer probe card for wafer-level testing

DS Liu, MK Shih, CM Chang - IEEE transactions on electronics …, 2009 - ieeexplore.ieee.org
The number of input and output pads on high-performance IC devices has increased in
recent years, and hence wafer-level testing is conventionally performed using a probe card …

Assessment of design and mechanical characteristics of MEMS probe tip with fine pitch

SJ Ha, DW Kim, BC Shin, MW Cho… - Journal of the Korea …, 2010 - koreascience.kr
The probe card are test modules which are to classify the good semiconductor chips and
thin film before the packaging process. In the rapid growth a technology of semiconductor …

Geometric parameter design of a cantilever probing needle used in epoxy ring probe card

DY Chang, JT Choi - Journal of materials processing technology, 2009 - Elsevier
In wafer probe card fabrication, contact force and forward displacement of needle tip are
both important considerations affecting the probing results critically. This study establishes a …

Novel analysis model for investigation of contact force and scrub length for design of probe card

DS Liu, CM Chang, J Liu, SC Ho, HY Tsai - Microelectronics Reliability, 2010 - Elsevier
Fabrication defects in IC chips are generally identified using a multi-layer needle probe card.
To prolong the life of the card, the needles in each layer should experience a similar contact …

An investigation of wafer probe needles mechanical properties and contact resistance changing under multiprobing process

DS Liu, MK Shih, FM Zheng - IEEE Transactions on …, 2008 - ieeexplore.ieee.org
In the semiconductor industry, fabrication defects in integrated circuit chips are generally
identified using a needle probe card. Ideally, the probe needles should have a high elastic …

Design optimization of needle geometry for wafer-level probing test

MK Shih, YS Lai - IEEE Transactions on Components and …, 2009 - ieeexplore.ieee.org
The probing test is a typical quality control method for individual chips on a wafer. With a
proper design, the service life of probing needles in the probe card can be sufficiently …