State-of-the-art in mode-localized MEMS coupled resonant sensors: A comprehensive review

V Pachkawade - IEEE Sensors Journal, 2021 - ieeexplore.ieee.org
This article reviews the investigation of the mode-localized microelectromechanical system
(MEMS) coupled resonant sensors. This class of a sensor features a new approach in the …

Mode-localized accelerometer in the nonlinear Duffing regime with 75 ng bias instability and 95 ng/√ Hz noise floor

H Zhang, M Pandit, G Sobreviela, M Parajuli… - Microsystems & …, 2022 - nature.com
Mode-localized sensors have attracted attention because of their high parametric sensitivity
and first-order common-mode rejection to temperature drift. The high-fidelity detection of …

Nonlinear dynamics of mode-localized MEMS accelerometer with two electrostatically coupled microbeam sensing elements

NF Morozov, DA Indeitsev, VS Igumnova… - International Journal of …, 2022 - Elsevier
In the presented work, a model of a microelectromechanical accelerometer with two
microbeam sensing elements located between two fixed electrodes is proposed. The action …

A high-performance mode-localized accelerometer employing a quasi-rigid coupler

H Zhang, G Sobreviela, D Chen… - IEEE Electron …, 2020 - ieeexplore.ieee.org
An ultra-sensitive mode-localized accelerometer is reported in this letter. In order to lower
the coupling factor of the coupled resonators thus improving the parametric amplitude ratio …

A decouple-decomposition noise analysis model for closed-loop mode-localized tilt sensors

K Wang, XY Xiong, Z Wang, L Ma, BW Wang… - Microsystems & …, 2023 - nature.com
The development of mode-localized sensors based on amplitude output metrics has
attracted increasing attention in recent years due to the potential of such sensors for high …

Dual-Resonator-Based (DRB) and Multiple-Resonator-Based (MRB) MEMS Sensors: A Review

Y Zhu, Z Zhao, Z Fang, L Du - Micromachines, 2021 - mdpi.com
Single-resonator-based (SRB) sensors have thrived in many sensing applications. However,
they cannot meet the high-sensitivity requirement of future high-end markets such as ultra …

On weakly coupled resonant MEMS transducers operating in the modal overlap regime

H Zhang, M Pandit, J Sun, D Chen… - IEEE Transactions …, 2020 - ieeexplore.ieee.org
Miniaturized physical transducers based on weakly coupled resonators have previously
demonstrated the twin benefits of high parametric sensitivity and the first-order common …

Enhancing the linear dynamic range of a mode-localized MEMS mass sensor with repulsive electrostatic actuation

T Rabenimanana, V Walter, N Kacem… - Smart Materials and …, 2021 - iopscience.iop.org
This letter demonstrates the linear dynamic range enhancement of a mode-localized
microelectromechanical systems sensor based on two weakly coupled cantilevers under …

Serial and parallel connections of micromechanical resonators for sensing: Theories and applications

H Chang - Journal of Microelectromechanical Systems, 2023 - ieeexplore.ieee.org
The mass-spring-damper resonator is the basic mechanical component of current
microelectromechanical systems (MEMS) sensors. It is typically implemented in various …

Resolution limit of mode-localised sensors

Z Zhang, H Chang - Science China Information Sciences, 2021 - Springer
In recent years, the mode localisation phenomenon of weakly coupled resonators has been
successfully utilised to improve the sensitivity of microelectromechanical system (MEMS) …