Mode-localized sensors have attracted attention because of their high parametric sensitivity and first-order common-mode rejection to temperature drift. The high-fidelity detection of …
NF Morozov, DA Indeitsev, VS Igumnova… - International Journal of …, 2022 - Elsevier
In the presented work, a model of a microelectromechanical accelerometer with two microbeam sensing elements located between two fixed electrodes is proposed. The action …
H Zhang, G Sobreviela, D Chen… - IEEE Electron …, 2020 - ieeexplore.ieee.org
An ultra-sensitive mode-localized accelerometer is reported in this letter. In order to lower the coupling factor of the coupled resonators thus improving the parametric amplitude ratio …
K Wang, XY Xiong, Z Wang, L Ma, BW Wang… - Microsystems & …, 2023 - nature.com
The development of mode-localized sensors based on amplitude output metrics has attracted increasing attention in recent years due to the potential of such sensors for high …
Y Zhu, Z Zhao, Z Fang, L Du - Micromachines, 2021 - mdpi.com
Single-resonator-based (SRB) sensors have thrived in many sensing applications. However, they cannot meet the high-sensitivity requirement of future high-end markets such as ultra …
H Zhang, M Pandit, J Sun, D Chen… - IEEE Transactions …, 2020 - ieeexplore.ieee.org
Miniaturized physical transducers based on weakly coupled resonators have previously demonstrated the twin benefits of high parametric sensitivity and the first-order common …
This letter demonstrates the linear dynamic range enhancement of a mode-localized microelectromechanical systems sensor based on two weakly coupled cantilevers under …
H Chang - Journal of Microelectromechanical Systems, 2023 - ieeexplore.ieee.org
The mass-spring-damper resonator is the basic mechanical component of current microelectromechanical systems (MEMS) sensors. It is typically implemented in various …
Z Zhang, H Chang - Science China Information Sciences, 2021 - Springer
In recent years, the mode localisation phenomenon of weakly coupled resonators has been successfully utilised to improve the sensitivity of microelectromechanical system (MEMS) …