Fabrication and characterization of high quality GeSbSe reflowed and etched ring resonators
We demonstrate the fabrication of high Q Ge_28Sb_12Se_60 ring resonators in an all
chalcogenide platform through electron-beam lithography, lift-off and thermal reflow. We …
chalcogenide platform through electron-beam lithography, lift-off and thermal reflow. We …
Chalcogenide Photonic Devices for the Near to Far Infrared
MB Grayson - 2022 - search.proquest.com
Chalcogenides are a group of amorphous glasses that are transparent from the near to far
infrared and have a high third order optical nonlinearity. We demonstrate the …
infrared and have a high third order optical nonlinearity. We demonstrate the …
Analytic estimation of line edge roughness for large-scale uniform patterns in electron-beam lithography
R Guo, SY Lee, J Choi, SB Kim, SH Park… - Journal of Vacuum …, 2016 - pubs.aip.org
As the feature size continues to be reduced well below nanoscale, the line edge roughness
(LER) will eventually become a resolution-limiting factor in the electron-beam (e-beam) …
(LER) will eventually become a resolution-limiting factor in the electron-beam (e-beam) …