Nonequilibrium Plasma Cleaning of Organic Contaminants on the Surface of Diffraction Gratings
Q Bai, X Liu, H Sun, Y Li, J Chen… - IEEE Transactions on …, 2023 - ieeexplore.ieee.org
Organic contamination of large-aperture optical components is one of the crucial factors
limiting the energy boost of inertial confinement fusion (ICF). Plasma cleaning technology is …
limiting the energy boost of inertial confinement fusion (ICF). Plasma cleaning technology is …