Temperature and frequency dependent electrical properties of SiO 2/nanocrystalline Si (nc-
Si)/SiO 2 sandwich structures have been studied. A clear shift of the capacitance–voltage …

Single-wall carbon nanotubes (SWNTs) were fluorinated with F2 at 250° C, and then some
were heated under He to temperatures ranging from 100 to 400° C to desorb the fluorine …

The fabrication and testing of Teflon AF-coated channels on silicon and bonding of the same
to a similarly coated glass wafer are described. With water or aqueous solutions in such …

With the advent of foldable electronics, it is necessary to develop a technology ensuring
foldability when the circuit lines are placed on the topmost substrate rather than in the …

A novel electrochemical route for the preparation of hydrophobic fluorinated amorphous
carbon (aC: F) films with nanostructured surfaces on single crystal silicon substrate was …

Amorphous fluorocarbon polymer films (aC: F) have been grown by plasma enhanced
chemical vapor deposition from a new precursor, namely perfluoro-octane (C 8 F 18) vapor …

Fluorinated amorphous diamond-like carbon films (aC: F) have been prepared on room-
temperature (100) Si substrates by using 13.56 MHz radio frequency plasma-enhanced …

We investigate the dielectric properties of fluorocarbon thin films deposited by radio-
frequency magnetron sputtering of polytetrafluroethylene. The dielectric constant and the …

Crystalline ZrTiO4 (ZTO) in orthorhombic phase with different plasma treatments was
explored as the charge-trapping layer for low-voltage operation flash memory. For ZTO …

The present work focuses on the plasma deposition of fluorocarbon (FC) films on surfaces
and the electrostatic control of their wettability (electrowetting). Such films can be employed …