Over the past few years, microelectromechanical system (MEMS) based on-chip resonators
have shown significant potential for sensing and high frequency signal processing …

In this paper, novel in-plane acoustic reflectors are proposed to enhance the quality factor
(Q) in lateral-mode micromachined resonators. Finite element coupled-domain simulation is …

A novel strategy is proposed for the dynamic modelling and quality factor evaluation of the
hemispherical shell resonators (HSR) considering the coupling of hemispherical shell and …

Abstract Silicon Microelectromechanical Systems (MEMS) resonators have broad
commercial applications for timing and inertial sensing. However, the performance of MEMS …

Semiconductor microresonators embedding quantum wells can host tightly confined and
mutually interacting excitonic, optical, and mechanical modes at once. We theoretically …

Predicting thermoelastic damping (TED) is crucial in the design of micro-resonators with
high quality factors. Until now, some analytical models have been developed to evaluate the …

This paper reports on a new type of high-frequency mode-matched gyroscope with
significantly reduced dependencies on environmental stimuli such as temperature, vibration …

The bending analysis due to thermoelastic loading in nanoscale materials is primarily
determined by the physical aspect of the material and the modeling of structures. This paper …

This paper presents an overview of multi degrees-of-freedom (DOF) inertial MEMS in
applications ranging from gaming to dead reckoning. Approaches to the implementation of …

MEMS resonators fabricated in silicon-on-insulator (SOI) technology must be clamped to the
substrate via anchoring stems connected either from within the resonator or through the …