A review of actuation and sensing mechanisms in MEMS-based sensor devices

AS Algamili, MHM Khir, JO Dennis, AY Ahmed… - Nanoscale research …, 2021 - Springer
Over the last couple of decades, the advancement in Microelectromechanical System
(MEMS) devices is highly demanded for integrating the economically miniaturized sensors …

Advances in humidity nanosensors and their application

CA Ku, CK Chung - Sensors, 2023 - mdpi.com
As the technology revolution and industrialization have flourished in the last few decades,
the development of humidity nanosensors has become more important for the detection and …

Nanostructures for biosensing, with a brief overview on cancer detection, IoT, and the role of machine learning in smart biosensors

A Banerjee, S Maity, CH Mastrangelo - Sensors, 2021 - mdpi.com
Biosensors are essential tools which have been traditionally used to monitor environmental
pollution and detect the presence of toxic elements and biohazardous bacteria or virus in …

Beyond biology: alternative uses of cantilever-based technologies

H Muñoz-Galán, C Alemán, MM Pérez-Madrigal - Lab on a Chip, 2023 - pubs.rsc.org
Micromechanical cantilever sensors are attracting a lot of attention because of the need for
characterizing, detecting, and monitoring chemical and physical properties, as well as …

Facile and cost-effective fabrication of highly sensitive, fast-response flexible humidity sensors enabled by laser-induced graphene

S Liu, R Chen, R Chen, C Jiang, C Zhang… - … Applied Materials & …, 2023 - ACS Publications
The need to simplify fabrication processes and reduce costs for high-performance humidity
sensors is increasingly vital, especially in fields such as healthcare and agriculture. This …

Highly sensitive humidity sensors based on polyethylene oxide/CuO/multi walled carbon nanotubes composite nanofibers

W Ahmad, B Jabbar, I Ahmad, B Mohamed Jan… - Materials, 2021 - mdpi.com
Polymer composites are favorite materials for sensing applications due to their low cost and
easy fabrication. In the current study, composite nanofibers consisting of polyethylene oxide …

Tracking of bifurcations and hysteresis in electrostatically actuated resonators by motion-induced current

B Alattar, M Ghommem, A Elhady, F Najar… - … Systems and Signal …, 2023 - Elsevier
In this work, we present an experimental technique to detect the onset of bifurcation and
measure the extent of hysteresis in electrostatic MEMS. The device-under-test comprises a …

Graphene-Based MEMS Devices for Gas Sensing Applications: A Review

T Owais, M Khater, H Al-Qahtani - Micro and Nanostructures, 2024 - Elsevier
Microelectromechanical systems (MEMS) that utilize graphene-based materials have gained
significant attention for gas-sensing applications owing to their unique properties. Graphene …

Optical relative humidity sensor based on a polyvinyl alcohol film and a phase-enhancement total-internal-reflection heterodyne interferometer

MC Hsieh, CH Liao, JY Lin - Sensors and Actuators A: Physical, 2020 - Elsevier
This study presents an optical relative humidity (RH) sensor based on the hydrophilic feature
of a polyvinyl alcohol (PVA) film and a phase-enhancement total-internal-reflection (TIR) …

VOC sensing using batch-fabricated temperature compensated self-leveling microstructures

R Likhite, A Banerjee, A Majumder, M Karkhanis… - Sensors and Actuators B …, 2020 - Elsevier
We present the design, fabrication, and response of a low-power, polymer-based VOC
sensor based on the self-leveling of mechanically leveraged structures. The device utilizes …