eduPIC: an introductory particle based code for radio-frequency plasma simulation
Particle based simulations are indispensable tools for numerical studies of charged particle
swarms and low-temperature plasma sources. The main advantage of such approaches is …
swarms and low-temperature plasma sources. The main advantage of such approaches is …
Electrical breakdown in dual-frequency capacitively coupled plasma: a collective simulation
Most plasma sources have to undergo a breakdown process, during which, energy is
injected, and particles are ionized. However, we still know little about this fast evolution …
injected, and particles are ionized. However, we still know little about this fast evolution …
2D particle-in-cell simulations of geometrically asymmetric low-pressure capacitive RF plasmas driven by tailored voltage waveforms
The effects of the simultaneous presence of two different types of plasma asymmetry, viz,
geometric and electrical, on low-pressure capacitively coupled argon discharges are studied …
geometric and electrical, on low-pressure capacitively coupled argon discharges are studied …
Charged particle dynamics and distribution functions in low pressure dual-frequency capacitively coupled plasmas operated at low frequencies and high voltages
P Hartmann, L Wang, K Nösges, B Berger… - Plasma Sources …, 2020 - iopscience.iop.org
In high aspect ratio (HAR) dielectric plasma etching, dual-frequency capacitively coupled
radio-frequency plasmas operated at low pressures of 1 Pa or less are used. Such plasma …
radio-frequency plasmas operated at low pressures of 1 Pa or less are used. Such plasma …
A computationally assisted technique to measure material-specific surface coefficients in capacitively coupled plasmas based on characteristics of the ion flux-energy …
C Schulze, Z Donkó, J Benedikt - Plasma Sources Science and …, 2022 - iopscience.iop.org
We present a new method for the determination of surface coefficients, more specifically the
effective ion-induced secondary electron yield, γ eff, and the effective elastic electron …
effective ion-induced secondary electron yield, γ eff, and the effective elastic electron …
2D particle-in-cell simulations of charged particle dynamics in geometrically asymmetric low pressure capacitive RF plasmas
Understanding the spatio-temporal dynamics of charged particles in low pressure radio
frequency capacitively coupled plasmas (CCP) is the basis for knowledge based process …
frequency capacitively coupled plasmas (CCP) is the basis for knowledge based process …
Enhanced adsorption of malachite green (MG) dye using RF glow oxygen plasma-modified coconut carbon shell: A sustainable approach for effluent treatment
The textile industry produces dye pollutants that are both harmful and difficult to degrade.
This study explores the enhanced adsorption of Malachite Green (MG) dye using coconut …
This study explores the enhanced adsorption of Malachite Green (MG) dye using coconut …
Ion-induced secondary electron emission of oxidized nickel and copper studied in beam experiments
R Buschhaus, M Prenzel… - Plasma Sources Science …, 2022 - iopscience.iop.org
Ion-induced secondary electron emission at a target surface is an essential mechanism for
laboratory plasmas, ie magnetron sputtering discharges. Electron emission, however, is …
laboratory plasmas, ie magnetron sputtering discharges. Electron emission, however, is …
Surface processes in low-pressure capacitive radio frequency discharges driven by tailored voltage waveforms
Abstract Particle-in-cell/Monte Carlo collisions (PIC/MCC) simulations are performed to
investigate the sputtering and the secondary electron emission (SEE) in geometrically …
investigate the sputtering and the secondary electron emission (SEE) in geometrically …
Breakdown modes of capacitively coupled plasma: II. Non-self-sustained discharges
This paper constitutes the second part of a two-part series investigating the breakdown
modes of capacitively coupled plasma across varying pressures, employing an implicit …
modes of capacitively coupled plasma across varying pressures, employing an implicit …