BD Ozsdolay, CP Mulligan,
K Balasubramanian… - Surface and Coatings …, 2016 - Elsevier
Abstract Tungsten nitride layers, 1.45-μm-thick, were deposited by reactive magnetron
sputtering on MgO (001), MgO (111), and Al 2 O 3 (0001) in 20 mTorr N 2 at T s= 500–800° …