Soft polymer materials, which are similar to human tissues, have played critical roles in
modern interdisciplinary research. Compared with conventional methods, 3D printing allows …

Additive manufacturing (AM) alias 3D printing translates computer-aided design (CAD)
virtual 3D models into physical objects. By digital slicing of CAD, 3D scan, or tomography …

The microfabrication of thick electroforming micro moulds using a KMPR negative tone
photoresist has been investigated. SU-8 resist is currently the most widely used thick resist …

The bottom anti-reflective coating (BARC) can enhance the resolution of nanopatterns in the
lithography process. In this work, a series of copolymers P (GA-co-HPMA) containing …

Miniaturized diagnostic devices hold the promise of accelerate the specific and sensitive
detection of various biomarkers, which can translate into many areas of medicine–from …

Recently, microelectroforming has been extensively applied to fabricating metallic
components for sensors, actuators, and other systems. Thick photoresists are used for …

A manufacturing process of micro nickel/diamond abrasive pellet array lapping tools using a
LIGA-like technology is reported here. The thickness of JSR THB-151N resist coated on an …

A method of forming a semiconductor structure includes forming a photoresist layer over a
substrate. The photoresist layer includes a first material removable by a removal process …

We describe essentially the lithography performed on a new photoresist, called DiaPlate
133. This negative resin has been structured by an x-ray beam produced by a new high …

Electrochemical deposition has been regarded as one of the key disciplines to
microtechnology [1], as it provides a way to produce high precision microcomponents in …