This article covers rigorous overview of diverse transduction principles that have enabled
successful development of micro/nanoelectromechanical systems (MEMS/NEMS) devices …

Photo-induced actuators enable potential applications involving soft robots, biomedical
engineering, and microelectromechanical system due to the contactless energy supply and …

The elastic properties of structural materials considerably influence the resonant frequency
of silicon MEMS resonators and their sensitivity to temperature variations. This work studies …

In this paper, the experimental methodology for the single-crystal circular plate deformation
measurement and subsequent procedure for the quantitation of its mechanical properties …

This paper presents a capacitive bulk mode resonator operating in Lamé mode, where the
motional resistance and temperature stability are enhanced by implementing a set of …

Piezoelectric (PZT) micro power generator (PMPG) has a great intention in designing and
fabricating self-powered small electronic devices. These PZT-based devices are very …

This article proposes an electrothermal three-degrees-of-freedom (3-DOF) micro-positioner
equipped with a waveguide path, which can potentially be used for chip-to-chip alignment in …

This work proposes an electrostatic MEMS aligner with the capability of integrating optical
waveguides onto its suspended mechanical structure. The proposed aligner, which has a …

This article offers rigorous overview of diverse transduction methods that have enabled
successful development of Micro/Nanoelectromechanical Systems (MEMS/NEMS) …

This work presents a novel micropositioner with 3 degrees-of-freedom (DOF) based on
attractive electrostatic forces. The proposed micropositioner is anchored at two distinct …