Method for manufacturing semiconductor substrate

S Akiyama, Y Kubota, A Ito, K Tanaka, M Kawai… - US Patent …, 2010 - Google Patents
A method for manufacturing a semiconductor substrate including: epitaxially growing a
silicon germanium (SiGe) film on a silicon (Si) substrate by a chemical vapor deposition …

Treating a SiGe layer for selective etching

C Delattre, N Daval - US Patent App. 11/356,927, 2007 - Google Patents
BACKGROUND 0001. The present invention relates to the fabrication of wafers, in particular
those of the strained silicon on insulator (sSOI) type. 0002. Several techniques exist for …

Method of recycling an epitaxied donor wafer

N Chhaimi, E Guiot, P Reynaud - US Patent App. 11/386,967, 2007 - Google Patents
A method for forming a semiconductor structure comprising a thin layer of semiconductor
material on a receiver wafer is disclosed. The method comprises removing a thickness of …

Treatment of a Germanium Layer Bonded with a Substrate

F Allibert, C Deguet, C Richtarch - US Patent App. 12/090,318, 2008 - Google Patents
The invention relates to a treatment method of a structure comprising a thin Gelayer on a
Substrate, said layer having been previously bonded with the substrate, the method com …

Treatment of a removed layer of silicon-germanium

N Daval - US Patent 7,232,737, 2007 - Google Patents
A method of forming a structure that includes a removed layer taken from a donor wafer
donor wafer that includes a first layer of Si 1-x Ge x and a second layer of Si 1-y Ge y. The …

Strain-direct-on-insulator (SDOI) substrate and method of forming

LW Teo, CF Tan, SS Tan, E Quek - US Patent 7,998,835, 2011 - Google Patents
Int. Cl. Methods (and semiconductor substrates produced therefrom p HOIL 2L/30(2006.01)
of fabricating (n-1) SDOI substrates using in wafers is HOIL 2L/216(2006.01) described. A …

Method for treating surface of soi substrate

S Akiyama, Y Kubota, A Ito, K Tanaka… - US Patent App. 12 …, 2011 - Google Patents
A method for minimizing thickness variation of a substrate in an anneal step and achieving
the smoothing of the surface of the substrate. Specifically provided is a method for treating …

SOI substrates with a fine buried insulating layer

D Landru, S Kerdiles - US Patent 7,892,951, 2011 - Google Patents
A method of producing a semiconductor structure having a buried insulating layer having a
thickness between 2 and 25 nm, by: forming at least one insulating layer on a surface of a …

Process for fabricating a silicon-on-insulator structure

C David, S Kerdiles - US Patent 9,230,848, 2016 - Google Patents
Embodiments of the invention relate to a process for fabricating a silicon-on-insulator
structure comprising the following steps: providing a donor substrate and a support …

Semiconductor material manufacture

N Sinha, GS Sandhu, J Smythe - US Patent 7,927,975, 2011 - Google Patents
Electronic apparatus, systems, and methods include a semiconductor layer bonded to a bulk
region of a wafer or a substrate, in which the semiconductor layer can be bonded to the bulk …