This paper is a review of the remarkable progress that has been made during the past few
decades in design, modeling, and fabrication of micromachined resonators. Although micro …

MEMS-based oscillators are an emerging class of highly miniaturized, batch manufacturable
timing devices that can rival the electrical performance of well-established quartz-based …

Room-temperature infrared sub-band gap photoresponse in silicon is of interest for
telecommunications, imaging and solid-state energy conversion. Attempts to induce infrared …

This review summarizes the reported MEMS resonators integrated monolithically in CMOS
technology and their main applications as oscillator circuits in timing applications and in …

The booming growth in environmental conditions sensing and monitoring pushes the need
of inexpensive environment sensors with small size and low power consumption. The …

A generalized foundry-oriented CMOS-MEMS platform well suited for integrated
micromechanical resonators alongside IC amplifiers has been developed for commercial …

This paper reports on the study and characterization of the non-linear regime of two CMOS-
NEMS flexural resonators electrically transduced for mechanical memory applications. A …

This letter presents the design, fabrication, and demonstration of a CMOS–MEMS filter
based on two high-Q submicrometer-scale clamped–clamped beam resonators with …

We examine the relationship between squeeze film effects and resonance frequency in
drum-type resonators. We find that the resonance frequency increases linearly with pressure …

In this paper, we summarize research activities and technological progress in the field of
current CMOS-MEMS resonators and oscillators for portable sensor node and timing …