MEMS-based oscillators are an emerging class of highly miniaturized, batch manufacturable
timing devices that can rival the electrical performance of well-established quartz-based …

We present a new temperature compensation system for microresonator-based frequency
references. It consists of a phase-locked loop (PLL) whose inputs are derived from two …

This paper presents a dual-microelectromechanical system (MEMS) resonator-based
temperature sensor. In this sensor, the readout circuit estimates the temperature by …

In this paper, we present dual-mode (DM) AlN-on-silicon micromechanical resonators for
self-temperature sensing. In-plane width-shear (WS) and width-extensional (WE) modes of …

This work demonstrates, for the first time, ovenization of a fully-encapsulated dual-mode
silicon MEMS resonator operational over a large ambient temperature range. We maintain a …

A second-order microelectromechanical systems (MEMS) filter with high selectivity and
sharp rolloff is required in wireless transceivers used in dense wireless sensor networks …

The invention relates to temperature compensated micro electro-mechanical (MEMS)
resonators (300) preferably made of silicon. Prior art MEMS resonators have a significant …

A novel complimentary metal-oxide-semiconductor-microelectormechanical systems (CMOS-
MEMS) composite ring resonator capable of a dual-mode operation has been proposed to …

Embodiments of the present disclosure provide self-cali brated thermal sensors of an
integrated circuit (IC) die and associated techniques and configurations. In one embodi …

The invention concerns a micromechanical device and method of manufacturing thereof.
The device comprises an oscillating or deflecting element made of semiconductor material …