Thin film encapsulation for the organic light-emitting diodes display via atomic layer deposition

Y Li, Y Xiong, H Yang, K Cao, R Chen - Journal of Materials …, 2020 - cambridge.org
Organic light-emitting diodes (OLEDs) have aroused great attention due to the advantages
of high luminescent efficiency, fast response time, wide viewing angle, and the compatibility …

Study on the optical properties of Iridium-coated lobster eye X-ray micro pore optics

L Li, C Zhang, J Wang, Z Ling, Z Jia, X Cong, G Jin… - Optical Materials, 2023 - Elsevier
Lobster eye micro pore optics (MPO) has been extensively researched, developed, and
experimented over the past few decades since Angel proposed it in 1979. The inner wall of …

Ultralightweight x-ray telescope missions: ORBIS and GEO-X

Y Ezoe, Y Miyoshi, S Kasahara… - Journal of …, 2018 - spiedigitallibrary.org
Toward an era of x-ray astronomy, next-generation x-ray optics are indispensable. To meet a
demand for telescopes lighter than the foil optics but with a better angular resolution< 1 …

Development of ultra-lightweight X-ray telescopes fabricated with MEMS technologies for GEO-X

M Numazawa, Y Ezoe, K Ishikawa… - … 2024: Ultraviolet to …, 2024 - spiedigitallibrary.org
We have been developing ultra-lightweight Wolter type-I X-ray telescopes fabricated with
MEMS technologies for GEO-X (GEOspace X-ray imager) which is a small satellite mission …

Enhanced X-ray reflectivity from Pt-coated silicon micropore optics prepared by plasma atomic layer deposition

D Ishi, Y Ezoe, K Ishikawa, M Numazawa… - Applied Physics …, 2020 - iopscience.iop.org
We report the enhancement of Pt-coated silicon micropore X-ray optics using plasma atomic
layer deposition (ALD). High-aspect-ratio micropores of width 20 μm and depth 300 μm were …

Improvement of imaging performance of silicon micropore X-ray optics by ultra long-term annealing

A Fukushima, D Ishi, Y Ezoe, K Ishikawa… - Optics …, 2022 - opg.optica.org
We have been developing a light-weight X-ray telescope using micro electro mechanical
systems technologies for future space missions. Micropores of 20 µm width are formed in a 4 …

Evaluating an electric field modulated plasma enhanced atomic layer deposition of platinum layers on different substrates

M Yan, T Zhang, B Wang, J Liu, X Liang… - Journal of Applied …, 2023 - pubs.aip.org
Atomic layer deposition is a key technique for preparing large area uniformity, three-
dimensional conformal, and ultrathin films due to its sequential self-limiting saturated …

Study of Pt growth on Si, Al2O3, Au, and Ni surfaces by plasma enhanced atomic layer deposition

M Yan, T Zhang, B Wang, J Liu, X Liang… - Journal of Applied …, 2021 - pubs.aip.org
Atomic layer deposition is a powerful technique for achieving atomic-level control in the
deposition of thin films and nanoparticles. The ultrathin noble metal films can be applied in …

Ultra-lightweight X-ray telescope fabricated with multiple MEMS technologies for GEO-X mission

M Numazawa, Y Ezoe, K Ishikawa… - … 2022: Ultraviolet to …, 2022 - spiedigitallibrary.org
We have been developing an ultra-lightweight Wolter type-I x-ray telescope fabricated with
MEMS technologies for GEO-X (geospace x-ray imager) which is an 18U CubeSat (∼ 20 kg) …

X-ray reflective coatings made of Pt, Al2O3/Pt, and Al2O3/Ni/Pt produced by atomic layer deposition

DL Windt, H Li, D Gorelikov, EM Gullikson… - Applied Optics, 2024 - opg.optica.org
The X-ray reflectance of Pt-based coatings deposited by atomic layer deposition (ALD) has
been measured in support of assessing the feasibility of using this deposition method for the …