Extreme-ultraviolet light source for lithography based on an expanding jet of dense xenon plasma supported by microwaves

IS Abramov, ED Gospodchikov, AG Shalashov - Physical Review Applied, 2018 - APS
We discuss a concept of a pointlike source of extreme-ultraviolet (EUV) light based on a
nonequilibrium microwave discharge in an expanding jet of dense xenon plasma with …

Observation of extreme ultraviolet light emission from an expanding plasma jet with multiply charged argon or xenon ions

AG Shalashov, AV Vodopyanov, IS Abramov… - Applied Physics …, 2018 - pubs.aip.org
We report on the first direct demonstration of the possibility to generate extreme ultraviolet
(EUV) radiation with a freely expanding jet of dense plasma with multiply charged ions …

Expansion of laser discharge in xenon jet improves EUV-light emission

IS Abramov, SV Golubev, ED Gospodchikov… - Applied Physics …, 2023 - pubs.aip.org
We consider a laser discharge in xenon jet as a source of extreme ultraviolet (EUV)-light. For
realistic plasma parameters, it is shown that the plasma with multiply charged ions, initially …

Effect of ion acceleration on a plasma potential profile formed in the expander of a mirror trap

IS Abramov, ED Gospodchikov… - Nuclear …, 2019 - iopscience.iop.org
We consider a flow of completely ionized magnetized plasma streaming along divergent
magnetic field lines from an open magnetic trap. An analytical model is proposed that takes …

Extreme ultraviolet radiation source based on a discharge sustained by a radiation pulse from a terahertz free-electron laser

IS Abramov, ED Gospodchikov… - Journal of Experimental …, 2021 - Springer
We consider the possibility of sustaining a discharge in xenon efficiently emitting light in a
wavelength range of 11.2 nm±1% by a subnanosecond terahertz radiation pulse. We have …

Investigation of ion acceleration effect influence on formation of ambipolar potential profile in the expander region

IS Abramov, ED Gospodchikov… - Review of Scientific …, 2020 - pubs.aip.org
This paper presents a study of plasma flux characteristics flowing out from the gas-dynamic
mirror trap along the magnetic field lines to a metal wall. The main feature of the current work …

Nonlinear Interaction of Microwave Radiation with a Plasma Flow under Hybrid Resonance Conditions

IS Abramov, ED Gospodchikov… - Journal of Experimental …, 2019 - Springer
We propose a simple model of quasi-one-dimensional steady-state nonequilibrium plasma
flow propagating along the axis of an open magnetic trap and sustained by an rf …

[PDF][PDF] НЕЛИНЕЙНОЕ ВЗАИМОДЕЙСТВИЕ СВЧ-ИЗЛУЧЕНИЯ С ПОТОКОМ ПЛАЗМЫ В УСЛОВИЯХ ГИБРИДНОГО РЕЗОНАНСА

ИС Абрамов, ЕД Господчиков… - … и теоретической физики, 2019 - jetp.ras.ru
Исследования взаимного влияния высокочастотного поля и плазмы посредством
усредненной пондеромоторной силы берут свое начало в классических работах [1–4] …

[PDF][PDF] Potentials of EUV light source based on microwave discharge in expanding jet of dense xenon plasma

IS Abramov, ED Gospodchikov… - arXiv preprint arXiv …, 2018 - researchgate.net
We discuss a concept of a point-like source of the extreme ultraviolet (EUV) light based on a
non-equilibrium microwave discharge in expanding jet of dense xenon plasma with multiply …

[DOC][DOC] INFLUENCE OF ion ACCELERATION ON potential PROFILE IN expander of OPEN MAGNETIC TRAP

IS Abramov, RA Shaposhnikov, ED Gospodchikov… - fpl.gpi.ru
An expander for open magnetic configurations is an analogue of a divertor in toroidal
systems: plasma expansion in a decreasing magnetic field is successfully used to suppress …