Wide-range Threshold Voltage Tunable β-Ga2O3 FETs with a Sputtered AlScN Ferroelectric Gate Dielectric
In this study, we demonstrate a-Ga2O3 ferroelectric field-effect transistor (Fe-FET) using a
sputtered aluminum scandium nitride (AlScN) gate dielectric. The device exhibits a steep …
sputtered aluminum scandium nitride (AlScN) gate dielectric. The device exhibits a steep …
Laser Ultrasound Investigations of AlScN (0001) and AlScN (11-20) Thin Films Prepared by Magnetron Sputter Epitaxy on Sapphire Substrates
EA Mayer, O Rogall, A Ding, A Nair, A Žukauskaitė… - Micromachines, 2022 - mdpi.com
The laser ultrasound (LU) technique has been used to determine dispersion curves for
surface acoustic waves (SAW) propagating in AlScN/Al2O3 systems. Polar and non-polar …
surface acoustic waves (SAW) propagating in AlScN/Al2O3 systems. Polar and non-polar …
Acoustic-Wave-Resonator-Based Bandpass Filters With Multiconfigurable and Continuously Tunable Transfer Function Capabilities
MRA Nasser, D Psychogiou - IEEE Transactions on Microwave …, 2024 - ieeexplore.ieee.org
New architectures for multiconfigurable and continuously tunable acoustic-wave-resonator
(AWR)-based bandpass filters (BPFs) are presented. They are based on the cascaded …
(AWR)-based bandpass filters (BPFs) are presented. They are based on the cascaded …
Theoretical and Experimental Study of High‐Electromechanical‐Coupling Surface Acoustic Wave Resonators Based on A‐Plane (11 2¯ 0) \left(\right.11⋅20\left.\right) …
W Xie, W Xuan, D Fu, Y Jiang, Q Wang… - physica status solidi …, 2024 - Wiley Online Library
Herein, a high‐quality Al0. 56Sc0. 44N (11 2¯ 0) \left(\right.11⋅20\left.\right) piezoelectric
thin‐film‐based surface acoustic wave (SAW) resonator is developed. The Al0. 56Sc0. 44N …
thin‐film‐based surface acoustic wave (SAW) resonator is developed. The Al0. 56Sc0. 44N …
压电AlN MEMS 的新进展(续).
赵正平 - Micronanoelectronic Technology, 2024 - search.ebscohost.com
Si 基微电子机械系统(MEMS) 经过三十余年的发展已进入智能微系统的发展阶段,
已成为当今MEMS 技术创新发展的主流. 当今半导体材料技术的科研已进入超宽禁带半导体的 …
已成为当今MEMS 技术创新发展的主流. 当今半导体材料技术的科研已进入超宽禁带半导体的 …
AlScN-Based SAW Resonator with Improved RF Performance Using High-Resistivity Silicon Substrate
Surface acoustic wave (SAW) resonators have been the core RF filtering technology for
mobile communication due to their inherent high quality-factor (Q) and small physical size …
mobile communication due to their inherent high quality-factor (Q) and small physical size …