On-machine and in-process surface metrology are important for quality control in
manufacturing of precision surfaces. The classifications, requirements and tasks of on …

With an increasing demand of photoelectric components, the micro/ultraprecision machining
technology has become more and more important. However, for some particular …

High-bandwidth nano-positioning stages (NPSs) have boosted the advancement of modern
ultra-precise, ultra-fast measurement and manufacturing technologies owing to their fast …

Fast tool servo (FTS) in ultra-precision machining (UPM) is an enabling and efficient
technology for fabricating optical freeform surfaces or microstructures with submicrometric …

This paper provides an overview of state-of-the-art sensing and machine learning
technologies for intelligent measurement in smart and precision manufacturing. Length …

For the machining accuracy of five-axis machine tools, it must be emphasized that not only
the PIGEs but also the PDGEs of rotary axes influence the machining accuracy. However …

Multi-component cutting force sensing systems in manufacturing processes applied to
cutting tools are gradually becoming the most significant monitoring indicator. Their signals …

In this paper, an optical measurement system is proposed to measure the six-degree-of-
freedom (6DOF) geometrical errors of a linear stage, and the errors are analyzed by the …

This paper presents precision on-machine measurement of microwear and microcutting
edge chipping of the diamond tool used in a force sensor integrated fast tool servo (FS-FTS) …

The transition from conventional standalone metrology to integrated metrology has been
accelerating in advanced manufacturing over the past decade. This keynote paper defines …