Laser scanners have been an integral part of MEMS research for more than three decades.
During the last decade, miniaturized projection displays and various medical-imaging …

A novel microelectromechanical systems (MEMS) actuation technique is developed for
retinal scanning display and imaging applications allowing effective drive of a two-axes …

Where conventional testing and inspection techniques fail at the micro-scale, optical
techniques provide a fast, robust, and relatively inexpensive alternative for investigating the …

Applications of digital micromirror device for lidar are overviewed. A large Lagrange
invariant value makes DMD as one of the attractive beam steering transmitter and receiver …

A comb-actuated torsional microscanner is developed for high-resolution laser-scanning
display systems. Typical torsional comb-drive scanners have fingers placed around the …

Due to the advancement of microoptoelectromechanical systems and
microelectromechanical systems (MEMS) technologies, novel display architectures have …

In this paper, the newly developed 3D-constructed AlScN piezoelectric MEMS mirror is
presented. This paper describes the structure and driving mechanism of the proposed mirror …

Scanning MEMS (micro-electro-mechanical system) mirrors are attractive given their
potential use in a diverse array of laser scanning display and imaging applications. Here we …

MEMS Laser beam scanning (LBS) has been identified as a key advancement for
augmented reality (AR) displays due to its ability to create compact optical systems that …

In this paper, we present the design, fabrication, and measurement results of a two-
dimensional electromagnetic scanning micromirror actuated by radial magnetic field. The …