微型压电及磁电式能量采集器的研究进展.

罗元, 万沙浪 - Journal of Chongqing University of Posts & …, 2016 - search.ebscohost.com
无线传感器网络是二十一世纪影响人们生活的关键技术之一, 具有广阔的应用前景,
而微型能量采集器因最有可能代替传统电池为其节点供电, 已成为国内外的研究热点 …

A design method and its CAD prototype system for surface micromachined MEMS devices

C Zhang, K Yun, P Cheng, H Ai - Microsystem Technologies, 2018 - Springer
Now the MEMS design method of “bottom–up”(mask-to-shape-to-function) has been
adopted widely. However, it is complicated, time-consuming and not straightforward and …