The production of thick film elecroceramic films (10–100 μm thick) for micro-
electromechanical system (MEMS) applications is of great interest due to the drive for …

Thick PZT films have been produced using a combination of spin coating of a composite
slurry and subsequent infiltration of PZT producing sol. The effect of adding a Cu2O–PbO …

In this paper, we present a new post-CMOS-compatible piezoelectric thin/thick film
technology that allows wafer-level integration of bulk piezoelectric ceramics such as lead …

We study the dielectric properties of 220 nm thick PbZr 0.2 Ti 0.8 O 3/SrTiO 3 (PZT/STO)
ferroelectric (FE)–paraelectric (PE) bilayers with varying PZT/STO layer fractions grown onto …

The integration and the device realization of Pb (Zr, Ti) O3 (PZT) thick films on Si substrates
are known to be extremely difficult because the processing temperature of the PZT thick film …

This paper starts from a review on the progress in fabrication of piezoelectric ceramic
coatings by thermal spray method. For our experimental work, two types of lead-free …

In this article, we report the structural and electrical properties of metal–ferroelectric–high k
dielectric–silicon (MFeIS) gate stack for non-volatile memory applications. Thin film of …

PZT thick films were prepared on alumina substrate by screen printing method. The paste
was made from PbTiO3–PbZrO3–Pb (Mn1/3Nb2/3) O3 ternary system with 1 wt.% excess …

Energy harvesting devices based on piezoelectric, pyroelectric, and thermoelectric materials
offer an attractive solution for batteryless and wireless sensor nodes for a range of sensor …

To achieve micro‐machined piezoelectric film devices, crack‐free and dense 10‐μm‐thick
lead zirconate titanate (PZT) films were successfully deposited onto 2‐in. Pt/Ti/SiO2/Si …