Some forensic in situ investigations, such as those needed in transportation (for aviation,
maritime, road, or rail accidents) or for parts working under harsh conditions (eg, pipes or …

This study aims to develop a dynamic pad monitoring system (DPMS) for measuring the
surface topography of polishing pad. Chemical mechanical planarization/polishing (CMP) is …

The field of non-destructive testing and evaluation (NDTE) comprises many different
techniques and approaches. Over the past few decades there have been tremendous ad …

We investigated the use of optical coherence tomography (OCT) to measure several
materials immersed in optical adhesives. The effects of variations in the concentration …

The structure and mechanical/chemical performance of particle abrasives in polishing
slurries play an important role in chemical mechanical polishing (CMP) processes. In the …

In this study, we report the applicability of two different Optical Coherence Tomography
(OCT) technologies for inspecting Light Emitting Diode (LED) structures. Sectional images of …

Optical coherence tomography (OCT) with the use of soft x-rays (SXR) and extreme
ultraviolet (EUV) has been recently demonstrated [Fuchs et al. Sci. Rep. 6, 20658 (2016) …

鉴于数字全息表面粗糙度测量是对被记录的数字全息图进行数值重建获得相应的相位值,
将其映射为表面轮廓值后来计算表面粗糙度参数的, 分别以标准分辨率板和高度标定板为检测 …

Chemical-mechanical polishing (CMP) has been an important process step in
microelectronic device manufacturing for more than three decades. Physical CMP modeling …

We have investigated depth-resolved cellular structures of unmodified fresh human scalp
hairs with ultrahigh-resolution full-field optical coherence tomography (FF-OCT). The Linnik …