In recent years, several new applications of SiC (both 4H and 3C polytypes) have been
proposed in different papers. In this review, several of these emerging applications have …

One of the key challenges faced by hypersonic flying is the complex thermal–mechanical–
chemical coupling effect between thermal protection materials and non-equilibrium flow …

Abstract 3C-SiC films grown on (111) Si substrates exhibit poor crystal quality and
experience wafer cracks and bowing preventing access to bulk growth. This work reports …

A methodology for the mapping of residual stresses in metal alloys has been developed by
analyzing an isotropic and homogeneous Al2024 alloy with scanning transmission electron …

This paper presents a simple method for the in situ determination of Young's moduli of
surface-micromachined bilayer thin films. The test structure consists of a cantilever, a bottom …

Investigation of surface blistering and exfoliation in silicon carbide (SiC) by H+ ion irradiation
can be utilized for the smart cut or ion cut process, which will overcome the major challenges …

This study reports a self-powered 3C-SiC/Si heterostructure photodetector in both metal-
semiconductor-metal (MSM) and heterojunction (HET) configurations and capable of …

In this work, the fabrication of wafer-level vacuum-packaged 3C-SiC on Si double-clamped
beam resonators via glass–silicon anodic bonding using Ti-based vacuum gettering is …

This study addresses the poor crystal quality and wafer cracks experienced by 3C-SiC films
grown on (111) Si substrates, which prevent access to bulk growth. By employing a novel …

In this work, we investigate, by μ-Raman spectroscopy the distribution of stress field on a
micro-machined structures. They were realized on a 3C-SiC substrate, grown on a Silicon …