The long-term reliability of MEMS devices related to the dielectric charging phenomenon is
one of the main hurdles in the commercialization of these devices. This paper presents a …

This work presents a high-performance Lamé mode resonator with high Q values. The
anchor loss and thermoelastic damping (TED) were effectively decreased with the optimized …

In this article, a new approach by introducing auxiliary structures in the tethers of a
microelectromechanical system (MEMS) resonator is presented to reduce anchor loss. A …

The movement or migration of charges in dielectric materials like silicon oxide, silicon nitride
and glass, is recognized as one of the most significant causes of drift instability of MEMS …

The term radio frequency (RF) microelectromechanical systems (MEMS) refers to electronic
devices with a moving submillimeter-sized part (beam, comb, disc, or ring), which provide …

A detection scheme for obtaining phase and absolute amplitude information of surface
vibrations on microacoustic components using homodyne laser interferometry is described …

The optical knife-edge displacement measurement technique can be used to quantify in-
plane vibrations of microstructures at radio frequencies. This paper presents an analytical …

This study introduces a novel high-Q Lamé mode MEMS resonator, optimized through
support beam structures and etching hole distributions to minimize anchor losses and …

Using fine electromagnetic signals to measure observables of other fields like curvature and
torsion of a space, and the corresponding value of their integrals of the action of perception …

The perforation of a Lamé bulk-mode silicon mechanical resonator via uniformly distributed
etch holes has been observed to drastically reduce the quality factor by over 90%. The …