Minimax optimization for recipe management in high-mixed semiconductor lithography process
This article addresses the application of minimax optimization in the control design of
complex dynamic systems of the semiconductor manufacturing. We highlight the main …
complex dynamic systems of the semiconductor manufacturing. We highlight the main …
Dynamic support vector regression control system for overlay error compensation with stochastic metrology delay
M Khakifirooz, CF Chien… - IEEE Transactions on …, 2019 - ieeexplore.ieee.org
This study aims to develop a robust monitoring system for advanced control and
compensation of the overlay errors based on E-insensitive support vector regression (SVR) …
compensation of the overlay errors based on E-insensitive support vector regression (SVR) …