The scanning microwave microscope is used for calibrated capacitance spectroscopy and
spatially resolved dopant profiling measurements. It consists of an atomic force microscope …

We have performed near-field scanning microwave microscopy (SMM) of graphene grown
by chemical vapor deposition. Due to the use of probe–sample capacitive coupling and a …

This paper presents a new algorithm for the calibration of nearfield scanning microwave
microscopes. By adopting techniques known from vector network analyzer calibration, a …

Electrically driven polar-plane-free faceted InGaN light-emitting diodes (LEDs) are
demonstrated on semipolar (⁠ 1 1 2 2⁠) GaN substrates. The doping properties on the (⁠ 1 …

A calibration algorithm based on one-port vector network analyzer (VNA) calibration for
scanning microwave microscopes (SMMs) is presented and used to extract quantitative …

We demonstrate the ability of the scanning microwave microscope (SMM) to detect
subsurface metal lines embedded in a dielectric film with sub-micrometer resolution. The …

We have proposed a method for quantitative capacitance measurements using frequency
modulation electrostatic force microscopy (EFM) with a dual bias modulation method and …

Connect basic theory with real-world applications with this practical, cross-disciplinary guide
to radio frequency measurement of nanoscale devices and materials.• Learn the techniques …

We measured the DC and RF impedance characteristics of micrometric metal-oxide-
semiconductor (MOS) capacitors and Schottky diodes using scanning microwave …

A procedure for doping concentration calibration using Scanning Microwave Microscopy
(SMM) is presented. Calibration measurements are performed at a purpose-built sample …