Centrifugal compressors are widely used for gas lift, re-injection and transport in the oil and
gas industry. Critical compressors that compress flammable gases and operate at high …

This article addresses the application of minimax optimization in the control design of
complex dynamic systems of the semiconductor manufacturing. We highlight the main …

Recently, to ensure product quality in high-mix semiconductor manufacturing processes, run-
to-run (R2R) control algorithms have received increasing attention. Difficult challenges have …

Mixed-product production is common practice in semiconductor manufacturing and has
attracted considerable academic attention recently. The main purpose of the mixed-product …

This paper proposes a new Run-to-Run (R2R) control framework based on deep
deterministic policy gradient (DDPG) for the mixed-product production mode in …

Time delay is a common phenomenon in robotic systems due to computational requirements
and communication properties between or within high-level and low-level controllers as well …

It is vital to have an exclusive modification in semiconductor production process because of
meeting differentiated customer demands in dynamic and competitive global minuscule …

In many batch-based industrial manufacturing processes, feedback run-to-run control is
used to improve production quality. However, measurements may be expensive and cannot …

In this paper, we propose a unified framework for the mixed-product run-to-run (RtR)
controller, which is called the output disturbance observer (ODOB) structure. Many mixed …

Abstract Operational optimization of Chemical Mechanical Polishing, which sets the proper
polishing time, is very important for improving the production efficiency of semiconductor …