The semiconductor industry continues to produce ever smaller devices that are ever more
complex in shape and contain ever more types of materials. The ultimate sizes and …

摘要在线测量检测技术与装备是保证集成电路(IC) 制造质量和良率的唯一有效技术手段, 在IC
制造过程中必须对IC 纳米结构的关键尺寸, 套刻误差, 以及缺陷等进行快速, 非破坏 …

Nanoelectronics is changing the way the world communicates, and is transforming our daily
lives. Continuing Moore's law and miniaturization of low-power semiconductor chips with …

This paper highlights the importance of measurement uncertainty in science, engineering,
and technology, to ensure accurate and reliable measurements. A bibliometric analysis that …

Quantitative optical measurements of deep subwavelength, three-dimensional (3D),
nanometric structures with sensitivity to sub-nanometer details address a ubiquitous …

Micro gears represent key components in an increasing number of industry, applications. To
satisfy the increasing quality requirements in terms of lifetime and noise emissions, new …

Library search is one of the most commonly used methods for solving the inverse problem in
optical scatterometry. The final measurement accuracy of the conventional library search …

Scatterometry is a non-imaging indirect optical method that is frequently used to reconstruct
the critical dimensions (CD) of periodic nanostructures, eg structured wafer surfaces in …

There has been much recent work in developing advanced optical metrology methods that
use imaging optics for critical dimension measurements and defect detection. Sensitivity to …

Hybrid metrology, eg, the combination of several measurement techniques to determine
critical dimensions, is an increasingly important approach to meet the needs of the …