Nanoelectronics is changing the way the world communicates, and is transforming our daily lives. Continuing Moore's law and miniaturization of low-power semiconductor chips with …
This paper highlights the importance of measurement uncertainty in science, engineering, and technology, to ensure accurate and reliable measurements. A bibliometric analysis that …
Quantitative optical measurements of deep subwavelength, three-dimensional (3D), nanometric structures with sensitivity to sub-nanometer details address a ubiquitous …
Micro gears represent key components in an increasing number of industry, applications. To satisfy the increasing quality requirements in terms of lifetime and noise emissions, new …
Library search is one of the most commonly used methods for solving the inverse problem in optical scatterometry. The final measurement accuracy of the conventional library search …
Scatterometry is a non-imaging indirect optical method that is frequently used to reconstruct the critical dimensions (CD) of periodic nanostructures, eg structured wafer surfaces in …
There has been much recent work in developing advanced optical metrology methods that use imaging optics for critical dimension measurements and defect detection. Sensitivity to …
Hybrid metrology, eg, the combination of several measurement techniques to determine critical dimensions, is an increasingly important approach to meet the needs of the …