High accuracy resonant pressure sensor with balanced-mass DETF resonator and twinborn diaphragms
X Du, L Wang, A Li, L Wang… - Journal of …, 2016 - ieeexplore.ieee.org
The design and fabrication of a resonant pressure sensor based on balanced-mass double-
ended tuning fork resonator with twinborn diaphragms are described. It is shown that the …
ended tuning fork resonator with twinborn diaphragms are described. It is shown that the …
Vacuum packaged low-power resonant MEMS strain sensor
This paper describes a technical approach toward the realization of a low-power
temperature-compensated micromachined resonant strain sensor. The sensor design is …
temperature-compensated micromachined resonant strain sensor. The sensor design is …
Fabrication of high-resolution strain sensors based on wafer-level vacuum packaged MEMS resonators
The paper reports on the fabrication and characterization of high-resolution strain sensors
for structural materials based on Silicon On Insulator flexural resonators manufactured by …
for structural materials based on Silicon On Insulator flexural resonators manufactured by …
A high performance torque sensor for milling based on a piezoresistive MEMS strain gauge
Y Qin, Y Zhao, Y Li, Y Zhao, P Wang - Sensors, 2016 - mdpi.com
In high speed and high precision machining applications, it is important to monitor the
machining process in order to ensure high product quality. For this purpose, it is essential to …
machining process in order to ensure high product quality. For this purpose, it is essential to …
Nanostrain resolution strain sensing by monocrystalline 3C-SiC on SOI electrostatic MEMS resonators
The paper reports on the fabrication and characterization of flexural resonators designed for
resonant strain sensing and manufactured using 2 μm thick monocrystalline 3C-SiC layers …
resonant strain sensing and manufactured using 2 μm thick monocrystalline 3C-SiC layers …
Design of jet-grouting for tunnel waterproofing
A case history in Barcelona is described where a tunnel was excavated by traditional
methods below an active railway line through a formation with lenses of water-bearing …
methods below an active railway line through a formation with lenses of water-bearing …
Advancements in noninvasive pressure sensing in hydraulic components
Sensors and sensorized components are gaining for importance in hydraulics, due to
increasing need for control and diagnostics. Sensors and specifically pressure sensors are …
increasing need for control and diagnostics. Sensors and specifically pressure sensors are …
Ultrahigh-dynamic-range resonant MEMS load cells for micromechanical test frames
This paper presents a resonant double-ended tuning fork (DETF) force sensor with an
experimentally demonstrated resolution of 7 nN and a compressive load range of 0.08 N …
experimentally demonstrated resolution of 7 nN and a compressive load range of 0.08 N …
High-resolution strain sensing on steel by silicon-on-insulator flexural resonators fabricated with chip-level vacuum packaging
This paper reports on the fabrication and characterization of high-resolution strain sensors
for steel based on Silicon On Insulator flexural resonators manufactured with chip-level …
for steel based on Silicon On Insulator flexural resonators manufactured with chip-level …
Torque measurements of an automotive halfshaft using micro double-ended tuning fork strain gauges
Double-ended tuning fork (DETF) strain gauges have potential applications in measuring a
number of structural components, improving safety and reducing maintenance costs …
number of structural components, improving safety and reducing maintenance costs …