Handbook of Silicon Based MEMS Materials and Technologies, Third Edition is a
comprehensive guide to MEMS materials, technologies, and manufacturing with a particular …

This chapter discusses reactive ion etching (RIE) and deep RIE (DRIE) on wafers detailing
the various equipment and reactor requirements for different applications. The Bosch …

In the present work, we perform finite element simulations to investigate the ablated surface
morphology of silicon by nanosecond pulsed laser ablation using low laser fluences ranging …

Advanced microsystems widely used in integrated optoelectronic devices, energy harvesting
components, and microfluidic lab-on-chips require high-aspect silicon microstructures with a …

This paper reports the design and fabrications of a smart vaporizing liquid microthruster for
the applications in small satellites. The thruster is fabricated with a conventional anodic …

Demand and development in the space industry are conditioning more costeffective
satellites without a reduction in functionality. One of the means of satisfying thus …