CF Liu, XG Tang, XB Guo, QX Liu, YP Jiang, ZH Tang… - Materials & Design, 2020 - Elsevier
HfO 2 thin film is deposited on p-Si substrates by RF magnetron sputtering apparatus and
annealed at 750° C for 10 min with O 2 atmosphere. Spectral analysis shows that HfO 2 thin …