Microsphere-assisted hyperspectral imaging: super-resolution, non-destructive metrology for semiconductor devices

J Park, Y Choi, S Kwon, Y Lee, J Kim, J Kim… - Light: Science & …, 2024 - nature.com
As semiconductor devices shrink and their manufacturing processes advance, accurately
measuring in-cell critical dimensions (CD) becomes increasingly crucial. Traditional test …

Investigation of Analog/RF and linearity performance with self-heating effect in nanosheet FET

S Rathore, RK Jaisawal, PN Kondekar, N Bagga - Microelectronics Journal, 2023 - Elsevier
In vertically stacked gate-all-around Nanosheet FET (NSFET), the channels/sheets are
wrapped by a low thermal conductivity material, which hinders the active heat flow path and …

Nanoscale thermal transport in vertical gate-all-around junctionless nanowire transistors—Part II: Multiphysics simulation

H Rezgui, C Mukherjee, Y Wang… - … on Electron Devices, 2023 - ieeexplore.ieee.org
Today, extensive research has focused on heat propagation in emerging nanoelectronic
devices. With advances in the fabrication of nanowire (NW) transistors, thermal management …

A new Vertical C-shaped Silicon Channel Nanosheet FET with Stacked High-K Dielectrics for Low Power Applications

BKJ IV, J Ajayan, SA Franklin, D Nirmal - Silicon, 2024 - Springer
Abstract Vertical Nanosheet Transistors serves as a potential substitute for the Nanowire
and FinFET architecture at advanced technology nodes on account of higher drive current …

Analytical model for the drain and gate currents in silicon nanowire and nanosheet MOS transistors valid between 300 and 500 K

A Cerdeira, M Estrada, M de Souza… - … Journal of Numerical …, 2024 - Wiley Online Library
This work presents an analytical model for the drain and gate currents of silicon nanowire
and nanosheet MOS transistors valid in all operating regions in the temperature range from …

Impact of self-heating on geometric variations in Nano-Ribbon FET: Analog/RF perspective

D Kumar, R Chaudhary, R Mitharwal… - Micro and …, 2024 - Elsevier
Abstract In recent technology, Nano Ribbon FET (NR-FET) is an emerging device due to its
enhanced effective width than other FET devices. In this paper, the electrical parameters …

Source/drain extension asymmetric counter-doping for suppressing channel leakage in stacked nanosheet transistors

Q Li, L Cao, Q Zhang, L Li, X Zhang, C Niu… - Microelectronics …, 2024 - Elsevier
In the relentless pursuit of semiconductor device scaling, stacked silicon nanosheet gate-all-
around field-effect transistors (NSFETs) are emerging as key candidates for sub-3nm …

Novel partial punch-through-stopper scheme for substrate leakage optimization of nanosheet field-effect transistors

H Luo, Y Li, F Zhao, JY Zhang, Y Li - Microelectronics Journal, 2024 - Elsevier
A novel and practicable partial punch-through-stopper (p-PTS) scheme beneath the gate
area is proposed for the substrate leakage current suppression in the gate-all-around (GAA) …

Strain Engineering for Highly Scaled MOSFETs

CK Maiti, T Dash, J Jena… - … : Current Trends and …, 2024 - Wiley Online Library
The advent of novel materials for manufacturing and the inherent constraints of nanoscale
devices, which lead to an increase in the unpredictability of device characteristics, pose …

DC Characteristics and Dynamic Properties of Multi-Channel Nanosheet MOSFETs with and without Tungsten Metal Sidewall for Sub-3-nm Technological Nodes

MH Chuang, Y Li - ECS Journal of Solid State Science and …, 2022 - iopscience.iop.org
Electrical characteristics of the multi-channel nanosheet (NS) metal-oxide-semiconductor
field effect transistors (MOSFETs) with (w/) and without (w/o) the low-resistivity (5.6× 10–6 Ω …