Cluster tools are automated robotic manufacturing systems containing multiple computer-
controlled process modules. They have been increasingly used for wafer fabrication. This …

Petri nets have gained increasing usage and acceptance as a basic model of asynchronous
concurrent systems since 1962. As a class of structural objects of Petri nets, siphons play a …

Many problems in manufacturing systems can be formulated via Markov stochastic
modeling. This paper gives a review and classification of timed models of manufacturing …

In this study, the problem of fault-tolerant sampled-data H∞ control for a networked control
system with random time delays and actuator faults is investigated. Stochastic variables …

Multi-agent and deteriorating scheduling has gained an increasing concern from academic
and industrial communities in recent years. This study addresses a two-agent stochastic flow …

This work considers the optimal scheduling problem for a campus central plant equipped
with a bank of multiple electrical chillers and a thermal energy storage (TES). Typically, the …

Cloud computing is a recently developed new technology for complex systems with massive
service sharing, which is different from the resource sharing of the grid computing systems …

Web service composition is a challenging research issue. This paper presents an automatic
Web service composition method that deals with both input/output compatibility and …

Timed Petri nets (TPNs) are useful for performance evaluation of discrete event systems due
to their mathematical formalism. This paper focuses on their use to model the preemption of …

In operating a multi-cluster tool, it needs to coordinate the activities of multiple robots. Thus,
it is very challenging to schedule it. This paper conducts a study on one-wafer cyclic …