A review of MEMS inertial switches

Y Cao, Z Xi - Microsystem technologies, 2019 - Springer
A microelectromechanical system (MEMS) inertial switch is both a sensor and an actuator by
only capturing a threshold and a close/open timestamp, yielding unique benefits like lower …

Characterization of contrast agent microbubbles for ultrasound imaging and therapy research

H Mulvana, RJ Browning, Y Luan… - IEEE transactions on …, 2016 - ieeexplore.ieee.org
The high efficiency with which gas microbubbles can scatter ultrasound compared with the
surrounding blood pool or tissues has led to their widespread employment as contrast …

Measurement system for full three-dimensional motion characterization of MEMS

C Rembe, RS Muller - Journal of Microelectromechanical …, 2002 - ieeexplore.ieee.org
Advanced testing methods for the dynamics of mechanical microdevices are necessary to
develop reliable, marketable microelectromechanical systems (MEMS). A key purpose for …

Optical measurement methods to study dynamic behavior in MEMS

C Rembe, R Kant, RS Muller - … Engineering: Metrology and …, 2001 - spiedigitallibrary.org
The maturing designs of moving microelectromechanical systems (MEMS) make it more-and-
more important to have precise measurements and visual means to characterize dynamic …

Measuring MEMS in motion by laser Doppler vibrometry

C Rembe, G Siegmund, H Steger… - Optical Inspection of …, 2019 - taylorfrancis.com
This chapter focuses on the methods and physical properties of laser Doppler vibrometry
that are important for the characterization of dynamics in Microelectromechanical Systems …

[HTML][HTML] Systematic theoretical research towards industrial application of high-speed microparticle impact resulting material modifications

Y Wang, A Reiser - Materials Today Communications, 2024 - Elsevier
Microscale particle-target interactions and the resulting modifications of the target material
play a crucial role in the domains of industrial manufacturing and application process. As …

Laser-scanning confocal vibrometer microscope: Theory and experiments

C Rembe, A Dräbenstedt - Review of scientific instruments, 2006 - pubs.aip.org
In this article we present a new laser-scanning confocal microscope for vibration
measurements in microscopic mechanical and biological structures. Our system can map …

Dry Test Methods for Micropumps

E Chappel - Applied Sciences, 2022 - mdpi.com
Featured Application This work describes the design for testability and the industrialized
functional test methods of an insulin micropump for type 1 diabetes care. Abstract The test in …

Analysis of the dynamics in microactuators using high-speed cine photomicrography

C Rembe, B Tibken, EP Hofer - Journal of …, 2001 - ieeexplore.ieee.org
This paper discusses the visualization of microdevice dynamics using high-speed cine
photomicrograph. The visualization results in image sequences, which contain the kinematic …

Thermal ink jet dynamics: modeling, simulation, and testing

C Rembe, S aus der Wiesche, EP Hofer - Microelectronics Reliability, 2000 - Elsevier
In this paper, we present a cinematographic measuring technique for visualization and
characterization of dynamics in micro electro mechanical systems for the example of a …