OA Kuznetsov, Y Zhang - US Patent 9,169,564, 2015 - Google Patents
A rapid liquid phase deposition (LPD) process of coating a substrate provides improved deposition rates. The LPD pro cess may include the following steps: incubation of acids with …
The present invention involves a method and apparatus for depositing a silicon oxide onto a substrate from solution at low temperatures in a manner that produces homogeneous growth …