Recent development of gallium oxide thin film on GaN

HS Oon, KY Cheong - Materials science in semiconductor processing, 2013 - Elsevier
Gallium nitride (GaN) has attracted much attention due to its outstanding characteristics. It
may replace conventional semiconductor materials, such as silicon, that are approaching …

Defect selective photoetching of GaN: Progress, applications and prospects

JL Weyher, JJ Kelly - Progress in Crystal Growth and Characterization of …, 2024 - Elsevier
Defect-selective etching methods are commonly used for a quick assessment of
crystallographic and chemical inhomogeneities in various semiconductors, including …

A conductivity‐based selective etching for next generation GaN devices

Y Zhang, SW Ryu, C Yerino, B Leung… - … status solidi (b), 2010 - Wiley Online Library
Electrochemical etching having large selectivity based on the conductivity of n‐type GaN
was investigated to demonstrate the feasibility of novel optical and microelectromechanical …

Role of photoelectrochemical oxidation in enabling high-efficiency polishing of gallium nitride

K Kayao, D Toh, K Yamauchi… - Ecs Journal of Solid State …, 2023 - iopscience.iop.org
Photoelectrochemical (PEC) oxidation is currently employed to improve the removal rates of
surface polishing methods applied to gallium nitride (GaN) wafers, such as PEC mechanical …

Interface properties of thermally oxidized n-GaN metal–oxide–semiconductor capacitors

Y Nakano, T Jimbo - Applied physics letters, 2003 - pubs.aip.org
We report on the interface properties of thermally oxidized n-GaN metal–oxide–
semiconductor capacitors fabricated on sapphire substrates. 100-nm-thick β-Ga 2 O 3 was …

Characterization of wide-band-gap semiconductors (GaN, SiC) by defect-selective etching and complementary methods

JL Weyher - Superlattices and microstructures, 2006 - Elsevier
Two defect-selective etching approaches used for revealing and analysis of defects in wide-
band-gap semiconductors (GaN, SiC) are described in detail:(i) orthodox etching in molten …

Toward quantitative electrochemical nanomachining of III-nitrides

C Zhang, G Yuan, A Bruch, K Xiong… - Journal of The …, 2018 - iopscience.iop.org
In this paper, a comprehensive quantitative investigation is conducted on III-N
electrochemical nanomachining to explore the underlying mechanisms. An electric circuit …

Photoetching mechanisms of GaN in alkaline S2O8 2− solution

DH Van Dorp, JL Weyher, MR Kooijman… - Journal of The …, 2009 - iopscience.iop.org
A study of the electrochemistry of n-type GaN in an alkaline peroxydisulfate solution was
used to explain the mechanism of photoetching of the semiconductor under open-circuit …

Effect of different electrolytes on porous GaN using photo-electrochemical etching

K Al-Heuseen, MR Hashim, NK Ali - Applied Surface Science, 2011 - Elsevier
This article reports the properties and the behavior of GaN during the photoelectrochemical
etching process using four different electrolytes. The measurements show that the porosity …

Centimeter-long III-Nitride nanowires and continuous-wave pumped lasing enabled by graphically epitaxial lift-off

J Dong, B Wang, X Zou, W Zhao, C He, L He, Q Wang… - Nano Energy, 2020 - Elsevier
It remains a big challenge to elongate one-dimensional (1D) semiconductor nanowires
(NWs), which can be attractive platforms for miniaturizing and/or integrating macroscopic …