Electrostatic pull-in instability in MEMS/NEMS: A review

WM Zhang, H Yan, ZK Peng, G Meng - Sensors and Actuators A: Physical, 2014 - Elsevier
Pull-in instability as an inherently nonlinear and crucial effect continues to become
increasingly important for the design of electrostatic MEMS and NEMS devices and ever …

Fractal N/MEMS: from pull-in instability to pull-in stability

D Tian, QT Ain, N Anjum, CH He, B Cheng - Fractals, 2021 - World Scientific
Pull-in instability, as an inherent nonlinear problem, continues to become an increasingly
important and interesting topic in the design of electrostatic Nano/Micro-electromechanical …

[图书][B] RF and microwave circuits, measurements, and modeling

M Golio, R Trew, J Golio, M Steer, LP Dunleavy… - 2018 - taylorfrancis.com
Highlighting the challenges RF and microwave circuit designers face in their day-to-day
tasks, RF and Microwave Circuits, Measurements, and Modeling explores RF and …

Double nanoplate-based NEMS under hydrostatic and electrostatic actuations

F Ebrahimi, SHS Hosseini - The European Physical Journal Plus, 2016 - Springer
Presented herein is a comprehensive investigation on the nonlinear vibration behavior of
nanoplate-based nano electromechanical systems (NEMS) under hydrostatic and …

Design, fabrication and characterization of flexible MEMS accelerometer using multi-Level UV-LIGA

MS Mahmood, Z Celik-Butler, DP Butler - Sensors and Actuators A …, 2017 - Elsevier
Surface micro-machined z-axis capacitive accelerometers were designed and fabricated on
a flexible polyimide substrate, conformal down to 2 cm radius of curvature with the stresses …

Using dynamic voltage drive in a parallel-plate electrostatic actuator for full-gap travel range and positioning

LA Rocha, E Cretu… - Journal of …, 2006 - ieeexplore.ieee.org
The nonlinear dynamics of the parallel-plate electrostatically driven microstructure have
been investigated with the objective of finding a dynamic voltage drive suitable for full-gap …

Auto-calibration of capacitive MEMS accelerometers based on pull-in voltage

LA Rocha, RA Dias, E Cretu, L Mol… - Microsystem …, 2011 - Springer
This paper describes an electro-mechanical auto-calibration technique for use in capacitive
MEMS accelerometers. Auto-calibration is achieved using the combined information derived …

Pull-in-based μg-resolution accelerometer: Characterization and noise analysis

RA Dias, E Cretu, R Wolffenbuttel, LA Rocha - Sensors and Actuators A …, 2011 - Elsevier
The pull-in time (tpi) of electrostatically actuated parallel-plate microstructures enables the
realization of a high-sensitivity accelerometer that uses time measurement as the …

High-resolution MEMS inclinometer based on pull-in voltage

FS Alves, RA Dias, JM Cabral… - Journal of …, 2014 - ieeexplore.ieee.org
High-resolution pull-in-based microelectromechanical system (MEMS) inclinometers are
presented in this paper. Pull-in is characterized by the sudden loss of stability in …

Effect of temperature on pull-in voltage and nonlinear vibration behavior of nanoplate-based NEMS under hydrostatic and electrostatic actuations

F Ebrahimi, SHS Hosseini - Acta Mechanica Solida Sinica, 2017 - Elsevier
This paper deals with the study of the temperature effect on the nonlinear vibration behavior
of nanoplate-based nano electromechanical systems (NEMS) subjected to hydrostatic and …