Evaluation and selection of materials for particulate matter MEMS sensors by using hybrid MCDM methods

CY Huang, PH Chung, JZ Shyu, YH Ho, CH Wu… - Sustainability, 2018 - mdpi.com
Air pollution poses serious problems as global industrialization continues to thrive. Since air
pollution has grave impacts on human health, industry experts are starting to fathom how to …

A Low-Temperature Micro Hotplate Gas Sensor Based on AlN Ceramic for Effective Detection of Low Concentration NO2

WJ Zhao, D Xu, YS Chen, X Wang, YB Shi - Sensors, 2019 - mdpi.com
Air pollution is one of the major threats to human health. The monitoring of toxic NO2 gas in
urban air emission pollution is becoming increasingly important. Thus, the development of …

GaN, GaAs and silicon based micromechanical free standing hot plates for gas sensors

J Jakovenko, T Lalinsky, M Drzik, M Ivanova, G Vanko… - Procedia …, 2009 - Elsevier
Main objective of the presented work deals with design, modelling and characterization of
new micro machined GaAs and GaN based hot plate thermal converters, which are …

Antenna-coupled uncooled THz microbolometer based on micromachined GaAs and LSMO thin film

P Lobotka, T Lalinsky, M Spankova, I Vavra… - SENSORS, 2008 …, 2008 - ieeexplore.ieee.org
We report on preliminary results on antenna-coupled microbolometer designed for
frequency range 1.4-11.3 THz. Thin film of a composition of La 0.67 Sr 0.33 MnO 3 (LSMO) …

Etude technologique pour l'amélioration des performances d'un capteur à gaz à oxyde métallique: développement d'une plateforme chauffante et intégration de …

P Ménini - 2010 - theses.fr
Avec les préoccupations actuelles de protection de l'environnement et des personnes, le
développement des capteurs de gaz à base d'oxyde métallique connaît un essor …

[PDF][PDF] Thermo-Mechanical Design of Electronic Systems

J Jakovenko - 2012 - dspace.cvut.cz
My very special thanks go to the Prof. Miroslav Husák the head of department who trusted
upon my efforts and encouraged me in taking specific research paths, who managed to …

Characteristic research on an accelerated sensor based on GaAs/AlGaAs/InGaAs PHEMT

X Jia, B Zhang, J Liu, C Xue… - 2010 IEEE 5th International …, 2010 - ieeexplore.ieee.org
A novel nano electro mechanical system (NEMS) accelerated sensor which is based on a
Pseudomorphic high electron mobility transistor (PHEMT) device with GaAs/AlGaAs/InGaAs …

[引用][C] MEMS 微型热敏传感器的隔热结构及其性能分析

马炳和, 周保清, 邓进军, 苑伟政 - 传感技术学报, 2008

[引用][C] AlN 微热板气体传感器阵列热失稳特性研究

周真, 赵文杰, 施云波, 王婷, 于洋 - 仪器仪表学报, 2013

[引用][C] 基于MEMS 技术的气体传感器

李珂, 于世洁, 尤政, 赵嘉昊 - 传感器与微系统, 2008