6,249,073 B1 6/2001 Nguyen et al. 6,336,366 B1 1/2002 Thundat et al. 6,349,454 B1*
2/2002 Manfra et al................ 29, 25.35 6,437.486 B1 8, 2002 BurcSu et al. 6,767,749 B2 …

US9762202B2 - Method of manufacturing a mechanical resonating structure - Google Patents
US9762202B2 - Method of manufacturing a mechanical resonating structure - Google Patents …

Disclosed are micromechanical resonator apparatus having features that permit multiple
resonators on the same substrate to operate at different operating frequencies. Exemplary …

(57) ABSTRACT A micro-electrical-mechanical system (MEMS) vibrating structure includes a
carrier Substrate, a first anchor, a second anchor, a single crystal piezoelectric body, and a …

Devices having piezoelectric material structures integrated with substrates are described.
Fabrication techniques for forming Such devices are also described. The fabrication may …

BACKGROUND The present invention relates generally to resonator sys tems, and more
particularly, to piezoelectrically-transduced polycrystalline diamond micromachined …

A system that incorporates the subject disclosure may include, for example, a method for
producing an electrical signal from an apparatus comprising an induction coil coupled to a …

Mechanical resonators are physical structures that are designed to vibrate at high
frequencies. Such resonators may be incorporated into a variety of devices Such as timing …

Devices having piezoelectric material structures integrated with substrates are described.
Fabrication techniques for forming such devices are also described. The fabrication may …

US PATENT DOCUMENTS FOREIGN PATENT DOCUMENTS 6,223,601 B1* 5/2001
Harada et al.................... T3/649 WO WO 98/37635 A1 8, 1998 6,249,073 B1 6/2001 Nguyen …