This paper presents the study of a fabrication technique of lenses arrays based on the reflow
of glass inside cylindrical silicon cavities. Lenses whose sizes are out of the microfabrication …

We present a micromachined vertical scanner with a $4\times 4$ array of suspended'spider-
type'micromirrors which is a key component of a multi-channel'active'Mirau …

This Letter reports on the fabrication of glass lens doublets arranged in arrays and realized
at wafer level by means of micro-fabrication. The technique is based on the accurate vertical …

We report the impact on imaging quality of mirror suspensions, referred to as spider legs,
used to support the reference mirror in a Mirau micro-interferometer that requires the vertical …

The EU-funded project VIAMOS1 proposes an optical coherence tomography system (OCT)
for skin cancer detection, which combines full-field and full-range swept-source OCT in a …

The paper presents the multi-wafer bonding technology as well as the integration of
electrical connection to the zscanner wafer of the micromachined array-type Mirau …

Systems for imaging require to employ high quality optical components in order to dispose of
optical aberrations and thus reach sufficient resolution. However, well-known methods to get …

In this paper, we present construction, fabrication and characterization of an electrostatic
MOEMS vertical microscanner for generation of an optical phase shift in array-type …

We describe a technological platform developed for miniaturization of optical imaging
instruments, such as laser scanning confocal microscopes or Optical Coherence …

In this work, vertical integration of miniaturized array-type Mirau interferometers at wafer
level by using multi-stack anodic bonding is presented. Mirau interferometer is suitable for …