Thin film piezoelectric materials offer a number of advantages in microelectromechanical
systems (MEMS), due to the large motions that can be generated, often with low hysteresis …

With advances in nanotechnology enabling us to structure new materials at the nanoscale,
the opportunity exists for developing novel material systems and devices capable of self …

This paper presents a comprehensive study on radio frequency-microelectromechanical
systems (RF-MEMS) switches, which are expected to be extensively integrated into 5G …

MEMS switch is a movable device manufactured by means of semiconductor technology,
possessing many incomparable advantages such as a small volume, low power …

In this paper, a novel method has been developed to control the pull-in voltage of the fixed-
fixed and cantilever MEM actuators and measure the residual stress in the fixed-fixed model …

Innovations in relevant micro-contact areas are highlighted, these include, design, contact
resistance modeling, contact materials, performance and reliability. For each area the basic …

An analysis of the dynamic characteristics of pull-in for parallel-plate and torsional
electrostatic actuators is presented. Traditionally, the analysis for pull-in has been done …

We describe the fabrication and characterization of a nanoelectromechanical (NEM) switch
based on carbon nanotubes. Our NEM structure consists of single-walled nanotubes …

The design, fabrication, and characterization of a novel low-frequency meandering
piezoelectric vibration energy harvester is presented. The energy harvester is designed for …

This paper presents a method for selecting metal alloys as the electric contact materials for
microelectromechanical systems (MEMS) metal contact switches. This procedure consists of …